Dichlorosilane - An intermediate between silane and silicon tetrachloride

TECHNICAL INFORMATION
Chemical Symbol SiH2CI2
Molecular Weight 101.07
Specific Volume1.013 bar and 25 °C (77
°F)) : 0.239 m3/kg
CAS Registry Number 4109-96-0
SHIPPING INFORMATION
DOT Proper Name Dichlorosilane
Hazard Class 2.3
ID Number UN2189
Labels Flammable Gas, Toxic Gas
CYLINDER SIZES AVAILABLE
Std. Cylinder Sizes*ContentsCylinder Pressure (PSIG)CGA Valve Connection
AL150 95lb 9 670/678

*Nonstandard cylinder sizes available upon request


SPECIFICATIONS SUBJECT TO CHANGE
CALL TO CONFIRM

GradePurityImpuritySpecifications Equipment Recommended
2.7
(Semiconductor
Process Gas)
99.7%

Inert Gas
Monochlorosilane
Trichlorosilane
Silicon Tetrachloride
Carbon
Aluminum
Arsenic
Boron
Iron
Phosphorous
Resistivity

<1000ppm
<800ppb/w
<2000ppb/w
<300ppb/w
<0.05ppb/w
<0.04ppb/w
<0.03ppb/w
<0.02ppb/w
<3ppb/w
<0.05ppb/w
>400 Ohm-cm

Call for Recommendation
2.0
(Semiconductor
Process Gas)
99.0%

Inert Gas
Carbon
Aluminum
Arsenic
Boron
Iron
Phosphorous
Monochlorosilane
Silicon Tetrachloride
Trichlorosilane
Resistivity

<10,000ppm
<1ppm/w
<1ppb/w
<0.2ppb/w
<0.01ppb/w
<50ppb/w
<1000ppm/w
<500ppm/w
<8000ppm/w
<0.05ppb/w
>400 Ohm-cm

Call for Recommendation

This information in no way replaces the Safety Data Sheets (SDS) for use and safety standards. Please refer to the SDS for details.