Silane

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Safety Data Sheet(s):

Silane- A colourless, flammable gas with a sharp, repulsive smell, somewhat similar to that of acetic acid

TECHNICAL INFORMATION
Chemical Symbol SiH4
Molecular Weight 32.12
Specific Volume  
CAS Registry Number 7803-62-5
SHIPPING INFORMATION
DOT Proper Name Silane
Hazard Class 2.1
ID Number UN2203
Labels Highly Flammable Gas
CYLINDER SIZES AVAILABLE
Std. Cylinder Sizes*ContentsCylinder Pressure (PSIG)CGA Valve Connection
150AL 5KG 976 350/632
200 5KG 1040 350/632

*Nonstandard cylinder sizes available upon request


SPECIFICATIONS SUBJECT TO CHANGE
CALL TO CONFIRM

GradePurityImpuritySpecifications Equipment Recommended
4.7 Semiconductor Process Grade 99.997%

AR
CO2
CO
Total Chlorosilanes
He
H2
CH4
N2
O2
H2O
Resistivity

<1ppm
<0.5ppm
<0.5ppm
<0.5ppm
<5ppm
<100ppm
<0.5ppm
<5ppm
<0.1ppm
<2ppm
>/=7,500 Ohm-cm

Call for Recommendation
4.0 Semicondutor Process Gas 99.99%

Ar
CO2
CO
Total Chlorosilanes
He
H2
CH4
N2
O2
H2O
Resistivity

<15ppm
<1ppm
<1ppm
<1ppm
<30ppm
<200ppm
<1ppm
<20ppm
<1ppm
<23ppm
>/=5,000 Ohm-cm

Call for Recommendation

This information in no way replaces the Safety Data Sheets (SDS) for use and safety standards. Please refer to the SDS for details.