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Halocarbon-23 (Trifluoremethane)- Is one of the "haloforms", a class of compounds with the formula CHX3 (X = halogen)


TECHNICAL INFORMATION
Chemical SymbolCHF3
Molecular Weight 70.01
Specific Volume 
CAS Registry Number75-46-7
SHIPPING INFORMATION
DOT Proper NameTrifluoromethane
Hazard Class2.2
ID Number 
LabelsNonflammable Gas
CYLINDER SIZES AVAILABLE
Std. Cylinder Sizes*ContentsCylinder Pressure (PSIG)CGA Valve Connection
300 70lb 635 660

*Nonstandard cylinder sizes available upon request


SPECIFICATIONS SUBJECT TO CHANGE
CALL TO CONFIRM

GradePurityImpuritySpecifications Equipment Recommended
4.5
(Semiconductor
Process Gas)
99.995%

Air
CO2
CH4
H2O
Other Halocarbons
Acidity (HF)

<15ppm
<2ppm
<1ppm
<4ppm
<10ppm
<1ppm/w

3401 or 3501
2.0
(Semiconductor
Process Gas)
99.0%

O2+N2
H2O
Other Halocarbons
Acidity (HF)

<5000ppm
<10ppm/w
<1000ppm
<0.1ppm/w

3401 or 3501

This information in no way replaces the Safety Data Sheets (SDS) for use and safety standards. Please refer to the SDS for details.