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Specialty Gases

Dichlorosilane Gas

An intermediate between silane and silicon tetrachloride

Learn more about Dichlorosilane gas, an intermediate between silane and silicon tetrachloride, supplied by Middlesex Gases to commercial customers in Massachusetts, New Hampshire, Rhode Island and Connecticut and throughout New England.

TECHNICAL INFORMATION

Chemical Symbol	SiH₂CI₂
Molecular Weight	101.07
Specific Volume	1.013 bar and 25 °C (77 °F)) : 0.239 m³/kg
CAS Registry Number	4109-96-0

SHIPPING INFORMATION

DOT Proper Name	Dichlorosilane
Hazard Class	2.3
ID Number	UN2189
Labels	Flammable Gas, Toxic Gas

CYLINDER SIZES AVAILABLE

Std. Cylinder Sizes*	Contents	Cylinder Pressure (PSIG)	CGA Valve Connection
AL150	95lb	9	670/678

*Nonstandard cylinder sizes available upon request

SPECIFICATIONS SUBJECT TO CHANGE

Additional Information

Grade	Purity	Impurity	Specifications	Equipment Recommended
2.7 (Semiconductor Process Gas)	99.7%	Inert Gas Monochlorosilane Trichlorosilane Silicon Tetrachloride Carbon Aluminum Arsenic Boron Iron Phosphorous Resistivity	<1000ppm <800ppb/w <2000ppb/w <300ppb/w <0.05ppb/w <0.04ppb/w <0.03ppb/w <0.02ppb/w <3ppb/w <0.05ppb/w >400 Ohm-cm	Call for Recommendation
2.0 (Semiconductor Process Gas)	99.0%	Inert Gas Carbon Aluminum Arsenic Boron Iron Phosphorous Monochlorosilane Silicon Tetrachloride Trichlorosilane Resistivity	<10,000ppm <1ppm/w <1ppb/w <0.2ppb/w <0.01ppb/w <50ppb/w <1000ppm/w <500ppm/w <8000ppm/w <0.05ppb/w >400 Ohm-cm	Call for Recommendation

This information in no way replaces the Safety Data Sheets (SDS) for use and safety standards. Please refer to the SDS for details.

Dichlorosilane Gas

Dichlorosilane Gas

An intermediate between silane and silicon tetrachloride

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