Specialty Gases
Silicon Tetrachloride
Silicon Tetrachloride Gas
A colorless, volatile liquid that fumes in air
Learn more about Silicon Tetrachloride gas, a colorless, volatile liquid that fumes in air, supplied by Middlesex Gases to commercial customers in Massachusetts, New Hampshire, Rhode Island and Connecticut and throughout New England.
TECHNICAL INFORMATION
| Chemical Symbol | SiCI4 |
| Molecular Weight | 169.90 |
| Specific Volume | 2.28 ft3/lb (0.142 m3/kg) |
| CAS Registry Number | 10026-04-7 |
SHIPPING INFORMATION
| DOT Proper Name | Silicon (IV) chloride |
| Hazard Class | 8 |
| ID Number | UN1818 |
| Labels | Corrosive |
CYLINDER SIZES AVAILABLE
| Std. Cylinder Sizes* | Contents | Cylinder Pressure (PSIG) | CGA Valve Connection |
|---|
*Nonstandard cylinder sizes available upon request
SPECIFICATIONS SUBJECT TO CHANGE
Additional Information
| Grade | Purity | Impurity | Specifications | Equipment Recommended |
|---|---|---|---|---|
4.0 (Fiber Optic) | 99.99% | HCl Trichlorosilane Aluminum Iron Other Metals (Ni, Cu, Cr, Mg) | <15ppm/w <10ppm/w <25ppb/w <50ppm/w <100ppb/w | Call for Recommendation |
3.8 (Semiconductor Process Gas) | 99.98% | Boron Carbon Donor (P & As) Other chlorosilanes Resistivity | <0.2ppb/w <2ppm/w <1ppb/w <0.06 %/w ≥100Ohm-cm | Call for Recommendation |
This information in no way replaces the Safety Data Sheets (SDS) for use and safety standards. Please refer to the SDS for details.
